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Good models of systems are difficult to construct and require a variety of skills from physics, electrical, mechanical and computer engineering to design and implement. For this process the determined mathematical models allows to: describe the mechanism of the process; simulate the behaviour; establish the control structure and strategy.
References  Astrom, K. Control, Dept. Sighişoarei, No. The reactive sputtering process has been simulated by integrating these differential equations.
Linearization has been applied for classical analysis of the sputtering process and control system design. Keywords: reactive sputtering process, dynamical modeling, linearization, steady state operating point, stability. Introduction Mathematical models may be developed along two methods: the analytical and the experimental way to get the dynamical model.
Development of the analytical dynamic model does not necessarily involve any experimentation on the actual system. The analytically obtained dynamical model generally is a system of nonlinear differential equations.
When faced with an engineering problem of a nonlinear system, the first approach usually is the linearization; in other words, trying to avoid the.